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产品名称:
压电陶瓷马达驱动精密定位平台（真空、无磁）
产品型号:
Vacuum and magnetic or non-magnetic
产品厂商:
上海微敏自控技术有限公司北京办事处
产品文档:
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简单介绍
德国Feinmess压电陶瓷马达驱动精密定位平台（真空、无磁）Vacuum and magnetic or non-magnetic
压电陶瓷马达驱动精密定位平台（真空、无磁）
的详细介绍
| 压电陶瓷马达驱动精密定位平台（真空、无磁）产品详细说明 |
| Positioning Systems in Vacuum- and magnetic / non-magnetic environments |  |
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All Products used in vacuum conditions and non-magnetic applications are seen as customized Solutions (FMD). That means, the customer is directly involved in the realisation of the project with regard to concrete operating conditions and purpose. The resulting parameters are customer specific and may differ from our standard products.
Definitions and Measures:
| | low vacuum | medium vacuum | high vacuum | ultra high
vacuum | | Range [Torr] | 1 - 10-3 | 10-3 - 10-5 | 10-6 - 10-8 | < 10-9 | | Measures: | 1 Torr = 1,33322 * 102 Pa (Pascal)
1 T (Tesla) = 1 Vs/m2 = 104 Vs/cm2 = 104 Gauß |
Vacuum compatibility:
Upon request all positioning systems are applicable to vacuum up to 10-1 Torr without special preparation. The materials, lubricants, and auxiliaries as well as actuators are chosen according to customers´ wishes; they are optimized to a minimum regarding gassing, dielectric- and thermal stability.
Non - magnetic applications:
In general, it can be assumed that positioning systems generate own magnetic fields and are magnetized by external fields; this can influence their function. In order to avoid this influence, two different solutions are possible. Upon request non-magnetic positioning systems are manufactured. The materials, lubricants, and auxiliaries as well as actuators are chosen according to customers´ wishes; the systems are optimized to a minimum regarding self- and external generation of magnetic fields.
The design and manufacture of these special components is effected by captive standards. Meaning that the systems are cleaned and post-treated (baked) for the use in high-vacuum. If required the final assembly takes place in the clean room (according DIN ISO).
For non-magnetic applications, suitable materials for bearings and drives are used. The main components have a specific permeability of 1.001. Therewith, systems can be created having a selfmagnetism of less than 1 milli Gauss.
In close cooperation with scientific research institutes, universities, and companies various solutions for positioning systems in vacuum or as non-magnetic system have been developed. |
压电陶瓷马达驱动精密定位平台（真空、无磁）
Example： Standard-Linear-Aperture Stage KDT105-50-LM-HV |  |
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| This under normal conditions approved x-y aperture stage, KDT105-50-LM, is mostly used in the electron beam lithography. Preparation for ultra-high vacuum is possible. |
| Standard Linear Stage PMT160-100-LM-HV |  |
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| This stage, derived from the standard option for normal environments (PMT160-...-LM), is designed for electron beam lithography equipment. The linear stage is designated for an environment of 10-8 Torr (app. 10-6 Pa). In order to minimize permanent and electromagnetic influences on the ion beam, suitable non magnetic materials are in use. |
| Combination of two Linear Stages (xz-Stage) |  |
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In order to manipulate objects in lateral and vertical direction in a high-vacuum environment with electron beam, this 2-axis unit has been developed. The used devices are non magnetic [with a residual magnetism < 0,2 nT (2000mGauß)].
The load to be traversed can be up to 10 kg. As the piezomotors have a low holding force, a spring system was built in. The bearings are made of titanium and ceramic balls.
This stage, derived from the standard option for normal environments LT105-...-LM. |
| Microstage MT105-30-LM-S |  |
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| Microstage MT105-30-LM-S; nonmagnetic, compact construction with two motors and titanium bearings. |
| Clean room assembly |  |
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| According to the technical / technological requirements and upon request we mount high-sensitive parts and components in our cleanroom or in flowboxes. |
Web：www.feinmess.de |